SELECTIVE GROWTH OF THIN CARBON FILMS ON DIELECTRICS SUBSTRATES

The method of control of the quality of thin carbon films obtained by ethanol vapor py-rolysis on the surface of dielectric substrates which was preliminary irradiated by e-beam is described. The influence of the exposure doses on the structural perfection of the obtained films was studied.

Key words: graphene-like films, chemical vapor deposition (CVD), electron beam (e-beam)

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2016, Т. 59, № 8, Стр. 51-55

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